Винтовой вакуумный насос EBARA VOS100

EBARA VOS100 pumps have the highest ratio of pumping speed to overall dimensions among all dry vacuum pumping products on the market.

The VOS100 model is based on a multistage Rut pump of a unique design and is designed for installation at a very close distance to the process chamber.

The pumps of the VOS series have excellent performance of speed of action with minimal weight, having a very compact design. There is no need for nitrogen supply for clean processes. The "R" version is suitable for pumping aggressive gases (for example, in etching processes).

Advantages:

• Compact overall dimensions. Ideal for integration into systems
• Low cost of ownership
• The use of energy-saving DC motors
• There is no need for nitrogen purging in clean processes

EB Vacuum Pump